eSource Optics Vacuum Ultraviolet  (VUV) Optical Filters are available at specific peak Vacuum UV (VUV) wavelengths as short as the 122nm Lyman Alpha line up to 214nm.  Narrow Bandwidth VUV optical filter designs are available designated as "FNB" having a ~20nm FWHM.   Popular Vacuum Ultraviolet (VUV) Analytical and Laser Lines are available including 122nm Lyman Alpha line, 155nm Carbon IV (C IV) line, 158nm Fluorine (F) Laser line, 172nm Xenon (Xe) Laser line, 184.9nm Mercury (Hg) Lamp line, 193nm Argon Fluoride (ArF) Laser line & 214nm Zinc (Zn) line.  Other Vacuum Ultraviolet (VUV) wavelengths are available upon request. Broad Bandwidth VUV optical filter designs are also available designated as "FBB"  having a ~35-50nm FWHM 

All VUV optical filters are available in standard 12.7mm, 25.4mm, and 50.8mm Diameters. VUV Optical Filters are metal-dielectric-metal (MDM) design thin-film VUV filters supplied as Unmounted and Open-Faced Filters.  Open-Faced VUV optical filters are manufactured using high purity UV grade Fused Silica substrate for VUV wavelengths 170nm to 214nm.  Open-Faced VUV optical filters are manufactured using high purity VUV grade MgF2 & CaF2 substrates for VUV wavelengths 121.6nm to 160nm.  Both VUV filter types are over-coated with the MDM filter coating. All VUV filter substrates are highly polished to a <40-20 scratch & dig surface quality with less than 5 arc minutes parallelism. 

Open-Faced VUV optical filters are fairly soft and must be handled with due care. For added durability and protection from the environment, VUV filters from 170nm to 214nm can be special ordered with a UV Fused Silica cover window that is edge sealed to the Open-faced VUV filter.  For more information on covered & edge sealed  VUV Optical Filters and/or VUV filter peak wavelengths not listed below, please contact eSource Optics.

                                                               

All eSource Optics VUV Optical Filters are supplied with individual Vacuum UV % Transmission Calibration Curves detailing VUV-UV spectral performance characteristics. VUV Optical Filters are mainly used in VUV D2 light source applications requiring a narrow spectral bandwidth and a high signal-to-noise ratio.

For more information on VUV Optical Filters, please refer to our Optics Tutorial page. 

                                        

VUV OPTICAL FILTER SPECIFICATIONS Substrate Material : VUV Grade MgF2 & VUV Grade CaF2 crystals, Crystal Quartz        Diameter (Ø) Tolerance: ± 0.25mm Thickness: ~1.5 - 5.0mm                         Surface Quality: <=40-20 scratch-dig Parallelism: <=10 arc minutes or better  Clear Aperture: central 80% Edge Chamfer: ~0.5mm x 45 degrees Filter FWHM:  FNB = ~ 20nm  Filter Blocking: Approx ~10-3 to ~10-4  >240nm to UV through FIR typical Construction: Unmounted and Open-Faced; >170nm can be covered (contact us)

  

                                                                                     Typical VUV % Transmission 122FNB
                                                                    

Peak Wavelength (nm)	FWHM (nm)	Min. Peak Transmission	Diameter(mm)	Product #	Price	Order*
122 +/- 2.5 Lyman Alpha	~20	15 % T VUV Optical Filter	12.7	12122FNB	$1335.00	12122FNB
122 +/- 2.5 Lyman Alpha	~20	15 % T VUV Optical Filter	25.4	25122FNB	$1390.00	25122FNB
122 +/- 2.5 Lyman Alpha	~20	15% T VUV Optical Filter	50.8	50122FNB	$1975.00	50122FNB
130 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	12.7	12130FNB	$1335.00	12130FNB
130 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	25.4	25130FNB	$1390.00	25130FNB
130 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	50.8	50130FNB	$1975.00	50130FNB
140 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	12.7	12140FNB	$1335.00	12140FNB
140 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	25.4	25140FNB	$1390.00	25140FNB
140 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	50.8	50140FNB	$1975.00	50140FNB
150 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	12.7	12150FNB	$1335.00	12150FNB
150 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	25.4	25150FNB	$1390.00	25150FNB
150 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	50.8	50150FNB	$1975.00	50150FNB
155 +/- 2.5 C IV	20 +/- 5	12 % T VUV Optical Filter	12.7	12155FNB	$1040.00	12155FNB
155 +/- 2.5 C IV	20 +/- 5	12 % T VUV Optical Filter	25.4	25155FNB	$1145.00	25155FNB
155 +/- 2.5 C IV	20 +/- 5	12 % T VUV Optical Filter	50.8	50155FNB	$1735.00	50155FNB
158 +/- 2.5 F Laser	20 +/- 5	12 % T VUV Optical Filter	12.7	12158FNB	$1040.00	12158FNB
158 +/- 2.5 F Laser	20 +/- 5	12 % T VUV Optical Filter	25.4	25158FNB	$1145.00	25158FNB
158 +/- 2.5 F Laser	20 +/- 5	12 % T VUV Optical Filter	50.8	50158FNB	$1735.00	50158FNB
161 +/- 2.5	20 +/- 7.5	12 % T VUV Optical Filter	12.7	12161FNB	$1040.00	12161FNB
161 +/- 2.5	20 +/- 7.5	12 % T VUV Optical Filter	25.4	25161FNB	$1145.00	25161FNB
161 +/- 2.5	20 +/- 7.5	12 % T VUV Optical Filter	50.8	50161FNB	$1735.00	50161FNB
170 +/- 2.5	20 +/- 7.5	15 % T VUV Optical Filter	12.7	12170FNB	$500.00	12170FNB
170 +/- 2.5	20 +/- 7.5	15 % T VUV Optical Filter	25.4	25170FNB	$645.00	25170FNB
170 +/- 2.5	20 +/- 7.5	15 % T VUV Optical Filter	50.8	50170FNB	$745.00	50170FNB
172 +/- 2.5 Xe Laser	20 +/- 7.5	15 % T VUV Optical Filter	12.7	12172FNB	$500.00	12172FNB
172 +/- 2.5 Xe Laser	20 +/- 7.5	15 % T VUV Optical Filter	25.4	25172FNB	$565.00	25172FNB
172 +/- 2.5 Xe Laser	20 +/- 7.5	15 % T VUV Optical Filter	50.8	50172FNB	$645.00	50172FNB
180 +/- 2.5	20 +/- 7.5	15 % T VUV Optical Filter	12.7	12180FNB	$450.00	12180FNB
180 +/- 2.5	20 +/- 7.5	15 % T VUV Optical Filter	25.4	25180FNB	$500.00	25180FNB
180 +/- 2.5	20 +/- 7.5	15 % T VUV Optical Filter	50.8	50180FNB	$595.00	50180FNB
184.9 +/- 2.5 Hg	20 +/- 7.5	15 % T VUV Optical Filter	12.7	12185FNB	$450.00	12185FNB
184.9 +/- 2.5 Hg	20 +/- 7.5	15 % T VUV Optical Filter	25.4	25185FNB	$500.00	25185FNB
184.9 +/- 2.5 Hg	20 +/- 7.5	15 % T VUV Optical Filter	50.8	50185FNB	$595.00	50185FNB
190 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	12.7	12190FNB	$450.00	12190FNB
190 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	25.4	25190FNB	$500.00	25190FNB
190 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	50.8	50190FNB	$595.00	50190FNB
193 +/- 2.5 ArF Laser	20 +/- 5	15 % T VUV Optical Filter	12.7	12193FNB	$450.00	12193FNB
193 +/- 2.5 ArF Laser	20 +/- 5	15 % T VUV Optical Filter	25.4	25193FNB	$500.00	25193FNB
193 +/- 2.5 ArF Laser	20 +/- 5	15 % T VUV Optical Filter	50.8	50193FNB	$595.00	50193FNB
200 +/- 2.5	20 +/- 5	15% T VUV Optical Filter	12.7	12200FNB	$425.00	12200FNB
200 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	25.4	25200FNB	$450.00	25200FNB
200 +/- 2.5	20 +/- 5	15 % T VUV Optical Filter	50.8	50200FNB	$575.00	50200FNB
214 +/- 2.5 Zn	20 +/- 5	15 % T VUV Optical Filter	12.7	12214FNB	$365.00	12214FNB
214 +/- 2.5 Zn	20 +/- 5	15 % T VUV Optical Filter	25.4	25214FNB	$395.00	25214FNB
214 +/- 2.5 Zn	20 +/- 5	15 % T VUV Optical Filter	50.8	50214FNB	$525.00	50214FNB