Vacuum UV Optical Bandpass Filters


eSource Optics Vacuum Ultraviolet  (VUV) Optical Bandpass Filters are available at specific peak Vacuum UV (VUV) wavelengths as short as the 122nm Lyman Alpha line up to 214nm. 

Narrow Bandwidth VUV Optical Bandpass Filter designs are available designated as "FNB" having a ~20nm FWHM.   Popular Vacuum Ultraviolet (VUV) Analytical and Laser Lines are available including 122nm Lyman Alpha line, 155nm Carbon IV (C IV) line, 158nm Fluorine (F) Laser line, 172nm Xenon (Xe) Laser line, 184.9nm Mercury (Hg) Lamp line, 193nm Argon Fluoride (ArF) Laser line & 214nm Zinc (Zn) line. Other Vacuum Ultraviolet (VUV) wavelengths are available upon request.  All VUV Optical Bandpass Filters are available in standard 12.7mm, 25.4mm, and 50.8mm Diameters.   

Broad Bandwidth VUV Optical Bandpass Filter designs are also available designated as "FBB"  having a ~35-50nm FWHM .


 

  

VUV NARROWBAND FILTER SPECIFICATIONS
 
Substrate Material : VUV Grade MgF2 &
VUV Grade CaF2 crystals, Crystal Quartz      
Diameter (Ø) Tolerance: ± 0.25mm
Thickness: ~1.5 - 5.0mm                         
Surface Quality: <=20-10 scratch-dig
Parallelism: <=3 arc minutes or better 
Clear Aperture: central 80%
Edge Chamfer: ~0.5mm x 45 degrees
Filter FWHM:  FNB = ~ 20-27nm 
Filter Blocking: Approx ~10-3 
10-4~350nm to
Vis through NIR typical

Construction: Unmounted and Open-Faced;
>170nm can be covered (contact us)

                                                                                                   
                                                                                                          Typical 122nm Filter VUV % Transmission P/N 122FNB

Peak Wavelength (nm)
FWHM (nm)
Min. Peak Transmission
Diameter(mm)
Product #
Price     
ORDER    
122 +/- 2.5 Lyman Alpha ~20 15 % T VUV Optical Filter 12.7 12122FNB $1445.00 12122FNB
122 +/- 2.5 Lyman Alpha ~20 15 % T VUV Optical Filter 25.4
25122FNB
$1550.00
122 +/- 2.5 Lyman Alpha ~20 15% T VUV Optical Filter 50.8
50122FNB
$1995.00
125 + - 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7 12125FNB $1445.00 12125FNB
125 + - 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4 25125FNB $1550.00 25125FNB
125 + - 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8 50125FNB $1995.00 50125FNB
130 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12130FNB
$1445.00
130 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25130FNB
$1550.00
130 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50130FNB
$1995.00
135 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 12.7
12135FNB
$1445.00
135 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25135FNB
$1550.00
135 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 50.8
50135FNB
$1995.00
140 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12140FNB
$1445.00
140 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25140FNB
$1550.00
140 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50140FNB
$1995.00
147 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter  12.7 
12147FNB
$1445.00
147 +/- 2.5  20 +/- 7.5 15 % T VUV Optical Filter   25.4 
25147FNB 
$1550.00 
147 +/- 2.5  20 +/- 7.5  15 % T VUV Optical Filter  50.8
50147FNB 
$1995.00
150 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12150FNB
$1445.00
150 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25150FNB
$1550.00
150 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50150FNB
$1995.00
155 +/- 2.5 C IV 20 +/- 5 12 % T VUV Optical Filter 12.7
12155FNB
$1445.00
155 +/- 2.5 C IV 20 +/- 5 12 % T VUV Optical Filter 25.4
25155FNB
$1550.00
155 +/- 2.5 C IV 20 +/- 5 12 % T VUV Optical Filter 50.8
50155FNB
$1995.00
158 +/- 2.5 F Laser 20 +/- 5 12 % T VUV Optical Filter 12.7
12158FNB
$1195.00
158 +/- 2.5 F Laser 20 +/- 5 12 % T VUV Optical Filter 25.4
25158FNB
$1250.00
158 +/- 2.5 F Laser 20 +/- 5 12 % T VUV Optical Filter 50.8
50158FNB
$1850.00
161 +/- 2.5 20 +/- 7.5 12 % T VUV Optical Filter 12.7
12161FNB
$1195.00
161 +/- 2.5 20 +/- 7.5 12 % T VUV Optical Filter 25.4
25161FNB
$1250.00
161 +/- 2.5 20 +/- 7.5 12 % T VUV Optical Filter 50.8
50161FNB
$1850.00
170 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 12.7
12170FNB
$665.00
170 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25170FNB
$745.00
170 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 50.8
50170FNB
$860.00
172 +/- 2.5 Xe Laser 20 +/- 7.5 15 % T VUV Optical Filter 12.7
12172FNB
$665.00
172 +/- 2.5 Xe Laser 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25172FNB
$745.00
172 +/- 2.5 Xe Laser 20 +/- 7.5 15 % T VUV Optical Filter 50.8
50172FNB
$860.00
180 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 12.7
12180FNB
$665.00
180 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25180FNB
$745.00
180 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 50.8
50180FNB
$860.00
184.9 +/- 2.5 Hg 20 +/- 7.5 15 % T VUV Optical Filter 12.7 12185FNB $665.00 12185FNB
184.9 +/- 2.5 Hg 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25185FNB
$745.00
184.9 +/- 2.5 Hg 20 +/- 7.5 15 % T VUV Optical Filter 50.8 50185FNB $860.00 50185FNB
190 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12190FNB
$575.00
190 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25190FNB
$625.00
190 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50190FNB
$750.00
193 +/- 2.5 ArF Laser 20 +/- 5 15 % T VUV Optical Filter 12.7
12193FNB
$575.00
193 +/- 2.5 ArF Laser 20 +/- 5 15 % T VUV Optical Filter 25.4
25193FNB
$625.00
193 +/- 2.5 ArF Laser 20 +/- 5 15 % T VUV Optical Filter 50.8
50193FNB
$750.00
200 +/- 2.5 20 +/- 5 15% T VUV Optical Filter 12.7
12200FNB
$535.00
200 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25200FNB
$575.00
200 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50200FNB
$730.00
210 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12210FNB
$535.00
210 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25210FNB
$575.00
210 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50210FNB
$730.00
214 +/- 2.5 Zn 20 +/- 5 15 % T VUV Optical Filter 12.7
12214FNB
$535.00
214 +/- 2.5 Zn 20 +/- 5 15 % T VUV Optical Filter 25.4
25214FNB
$575.00
214 +/- 2.5 Zn 20 +/- 5 15 % T VUV Optical Filter 50.8
50214FNB
$730.00

 
                                              (>>Next 220nm to 266nm UV Optical Bandpass Filters>>>)

Availability: eSource Optics VUV-UV Optical Filters are supplied on a per order basis; lead-time is typically within ~3-4 weeks.

See other typical VUV-UV Narrowband Filter Transmission Curves
 

VUV Optical Bandpass Filters are metal-dielectric-metal (MDM) design thin-film VUV bandpass filters supplied as Unmounted and Open-Faced Filters.  Open-Faced VUV Optical Bandpass Filters are manufactured using high purity VUV grade MgF2, CaF2 & Quartz substrates for VUV wavelengths 121.6nm to 160nm.  Open-Faced VUV Optical Bandpass Filters are manufactured using high purity UV grade Fused Silica substrate for VUV wavelengths 170nm to 214nm. More information can be found on our Material Properties Page.   Both VUV bandpass filter types are over-coated with the MDM filter coating. All VUV filter substrates are highly polished to a <20-10 scratch & dig surface quality with less than 3 arc minutes parallelism. 

All eSource Optics VUV Optical Bandpass Filters are supplied with individual Vacuum UV % Transmission Calibration Curves detailing normal incidence VUV-UV spectral performance characteristics. VUV Optical Bandpass Filters are mainly used in VUV D2 light source applications requiring a narrow spectral bandwidth and a high signal-to-noise ratio.

Open-Faced VUV Optical Bandpass Filters are fairly soft and must be handled with due care. For added durability and protection from the environment, VUV bandpass filters from 170nm to 214nm can be special ordered with a UV Fused Silica cover window that is edge sealed to the Open-faced VUV bandpass filter.  For more information on covered & edge sealed  VUV Optical Bandpass Filters and/or VUV filter peak wavelengths not listed below, please contact eSource Optics.

 


                                                                                              



For more information on VUV Optical Bandpass Filters, please refer to our VUV-UV Optical Filter Information Page 



                        Also see eSource Optics VUV Broadband Filters

                                                

                                                   
              eSource Optics / PMB 126 / 1225 Providence Rd. / Whitinsville, MA 01516

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