eSource Optics Vacuum Ultraviolet  (VUV) Optical Filters are available at specific peak Vacuum UV (VUV) wavelengths as short as the 122nm Lyman Alpha line up to 214nm.  Narrow Bandwidth VUV optical filter designs are available designated as "FNB" having a ~20nm FWHM.   Popular Vacuum Ultraviolet (VUV) Analytical and Laser Lines are available including 122nm Lyman Alpha line, 155nm Carbon IV (C IV) line, 158nm Fluorine (F) Laser line, 172nm Xenon (Xe) Laser line, 184.9nm Mercury (Hg) Lamp line, 193nm Argon Fluoride (ArF) Laser line & 214nm Zinc (Zn) line.  Other Vacuum Ultraviolet (VUV) wavelengths are available upon request. Broad Bandwidth VUV optical filter designs are also available upon request designated as "FBB"  having a ~35-50nm FWHM 

All VUV optical filters are available in standard 12.7mm, 25.4mm, and 50.8mm Diameters. VUV Optical Filters are metal-dielectric-metal (MDM) design thin-film VUV filters supplied as Unmounted and Open-Faced Filters.  Open-Faced VUV optical filters are manufactured using high purity UV grade Fused Silica substrate for VUV wavelengths 170nm to 214nm.  Open-Faced VUV optical filters are manufactured using high purity VUV grade MgF2 & CaF2 substrates for VUV wavelengths 121.6nm to 160nm.  Both VUV filter types are over-coated with the MDM filter coating. All VUV filter substrates are highly polished to a <40-20 scratch & dig surface quality with less than 5 arc minutes parallelism. 

Open-Faced VUV optical filters are fairly soft and must be handled with due care. For added durability and protection from the environment, VUV filters from 170nm to 214nm can be special ordered with a UV Fused Silica cover window that is edge sealed to the Open-faced VUV filter.  For more information on covered VUV Optical Filters and/or VUV filter peak wavelengths not listed below, please contact eSource Optics.

VUV OPTICAL FILTER SPECIFICATIONS Substrate Material : VUV Grade MgF2 & VUV Grade CaF2 crystals, Crystal Quartz        Diameter (Ø) Tolerance: ± 0.25mm Thickness: ~2.5 - 3.0mm                        Surface Quality: <=40-20 scratch-dig Parallelism: <=10 arc minutes or better  Clear Aperture: central 80% Edge Chamfer: ~0.5mm x 45 degrees Filter FWHM:  FNB = ~ 20nm  Filter Blocking: 10-3 to 10-4 X-ray to FIR Construction: Unmounted and Open-Faced; >170nm can be covered (contact us)

                                                                    

Peak Wavelength (nm)	FWHM (nm)	Min. Peak Transmission	Diameter(mm)	Product #	Price	Order*
122 +/- 2.5 Lyman Alpha	~20	15 % T Optical Filter	12.7	12122FNB	$1325.00	12122FNB
122 +/- 2.5 Lyman Alpha	~20	15 % T Optical Filter	25.4	25122FNB	$1365.00	25122FNB
122 +/- 2.5 Lyman Alpha	~20	15% T Optical Filter	50.8	50122FNB	$1695.00	50122FNB
130 +/- 2.5	20 +/- 5	15 % T Optical Filter	12.7	12130FNB	$1325.00	12130FNB
130 +/- 2.5	20 +/- 5	15 % T Optical Filter	25.4	25130FNB	$1365.00	25130FNB
130 +/- 2.5	20 +/- 5	15 % T Optical Filter	50.8	50130FNB	$1695.00	50130FNB
140 +/- 2.5	20 +/- 5	15 % T Optical Filter	12.7	12140FNB	$1325.00	12140FNB
140 +/- 2.5	20 +/- 5	15 % T Optical Filter	25.4	25140FNB	$1365.00	25140FNB
140 +/- 2.5	20 +/- 5	15 % T Optical Filter	50.8	50140FNB	$1695.00	50140FNB
150 +/- 2.5	20 +/- 5	15 % T Optical Filter	12.7	12150FNB	$1325.00	12150FNB
150 +/- 2.5	20 +/- 5	15 % T Optical Filter	25.4	25150FNB	$1365.00	25150FNB
150 +/- 2.5	20 +/- 5	15 % T Optical Filter	50.8	50150FNB	$1695.00	50150FNB
155 +/- 2.5 C IV	20 +/- 5	12 % T Optical Filter	12.7	12155FNB	$1150.00	12155FBB
155 +/- 2.5 C IV	20 +/- 5	12 % T Optical Filter	25.4	25155FNB	$1200.00	25155FBB
155 +/- 2.5 C IV	20 +/- 5	12 % T Optical Filter	50.8	50155FNB	$1550.00	50155FBB
158 +/- 2.5 F Laser	20 +/- 5	12 % T Optical Filter	12.7	12158FNB	$1150.00	12158FNB
158 +/- 2.5 F Laser	20 +/- 5	12 % T Optical Filter	25.4	25158FNB	$1200.00	25158FNB
158 +/- 2.5 F Laser	20 +/- 5	12 % T Optical Filter	50.8	50158FNB	$1550.00	50158FNB
161 +/- 2.5	20 +/- 7.5	12 % T Optical Filter	12.7	12161FNB	$1150.00	12161FNB
161 +/- 2.5	20 +/- 7.5	12 % T Optical Filter	25.4	25161FNB	$1200.00	25161FNB
161 +/- 2.5	20 +/- 7.5	12 % T Optical Filter	50.8	50161FNB	$1550.00	50161FNB
170 +/- 2.5	20 +/- 7.5	15 % T Optical Filter	12.7	12170FNB	$725.00	12170FNB
170 +/- 2.5	20 +/- 7.5	15 % T Optical Filter	25.4	25170FNB	$775.00	25170FNB
170 +/- 2.5	20 +/- 7.5	15 % T Optical Filter	50.8	50170FNB	$875.00	50170FNB
172 +/- 2.5 Xe Laser	20 +/- 7.5	15 % T Optical Filter	12.7	12172FNB	$725.00	12172FNB
172 +/- 2.5 Xe Laser	20 +/- 7.5	15 % T Optical Filter	25.4	25172FNB	$775.00	25172FNB
172 +/- 2.5 Xe Laser	20 +/- 7.5	15 % T Optical Filter	50.8	50172FNB	$875.00	50172FNB
180 +/- 2.5	20 +/- 7.5	15 % T Optical Filter	12.7	12180FNB	$650.00	12180FNB
180 +/- 2.5	20 +/- 7.5	15 % T Optical Filter	25.4	25180FNB	$675.00	25180FNB
180 +/- 2.5	20 +/- 7.5	15 % T Optical Filter	50.8	50180FNB	$800.00	50180FNB
184.9 +/- 2.5 Hg	20 +/- 7.5	15 % T Optical Filter	12.7	12185FNB	$650.00	12185FNB
184.9 +/- 2.5 Hg	20 +/- 7.5	15 % T Optical Filter	25.4	25185FNB	$675.00	25185FNB
184.9 +/- 2.5 Hg	20 +/- 7.5	15 % T Optical Filter	50.8	50185FNB	$800.00	50185FNB
190 +/- 2.5	20 +/- 5	15 % T Optical Filter	12.7	12190FNB	$650.00	12190FNB
190 +/- 2.5	20 +/- 5	15 % T Optical Filter	25.4	25190FNB	$675.00	25190FNB
190 +/- 2.5	20 +/- 5	15 % T Optical Filter	50.8	50190FNB	$800.00	50190FNB
193 +/- 2.5 ArF Laser	20 +/- 5	15 % T Optical Filter	12.7	12193FNB	$650.00	12193FBB
193 +/- 2.5 ArF Laser	20 +/- 5	15 % T Optical Filter	25.4	25193FNB	$675.00	25193FBB
193 +/- 2.5 ArF Laser	20 +/- 5	15 % T Optical Filter	50.8	50193FNB	$800.00	50193FBB
200 +/- 2.5	20 +/- 5	15% T Optical Filter	12.7	12200FNB	$580.00	12200FNB
200 +/- 2.5	20 +/- 5	15 % T Optical Filter	25.4	25200FNB	$600.00	25200FNB
200 +/- 2.5	20 +/- 5	15 % T Optical Filter	50.8	50200FNB	$785.00	50200FNB
214 +/- 2.5 Zn	20 +/- 5	15 % T Optical Filter	12.7	12214FNB	$580.00	12214FNB
214 +/- 2.5 Zn	20 +/- 5	15 % T Optical Filter	25.4	25214FNB	$600.00	25214FNB
214 +/- 2.5 Zn	20 +/- 5	15 % T Optical Filter	50.8	50214FNB	$785.00	50214FNB