Vacuum UV Optical Filters

eSource Optics Vacuum Ultraviolet (VUV) Optical Bandpass Filters are available at specific peak Vacuum UV (VUV) wavelengths as short as the 122nm Lyman Alpha line up to 214nm. Narrow Bandwidth VUV Optical Bandpass Filter designs are available designated as "FNB" having a ~20nm FWHM.   Popular Vacuum Ultraviolet (VUV) Analytical and Laser Lines are available including 122nm Lyman Alpha line, 155nm Carbon IV (C IV) line, 158nm Fluorine (F) Laser line, 172nm Xenon (Xe) Laser line, 184.9nm Mercury (Hg) Lamp line, 193nm Argon Fluoride (ArF) Laser line & 214nm Zinc (Zn) line. Other Vacuum Ultraviolet (VUV) wavelengths are available upon request. Broad Bandwidth VUV Optical Bandpass Filter designs are also available designated as "FBB"  having a ~35-50nm FWHM

All VUV Optical Bandpass Filters are available in standard 12.7mm, 25.4mm, and 50.8mm Diameters. VUV Optical Bandpass Filters are metal-dielectric-metal (MDM) design thin-film VUV bandpass filters supplied as Unmounted and Open-Faced Filters. Open-Faced VUV Optical Bandpass Filters are manufactured using high purity UV grade Fused Silica substrate for VUV wavelengths 170nm to 214nm. Open-Faced VUV Optical Bandpass Filters are manufactured using high purity VUV grade MgF2 & CaF2 substrates for VUV wavelengths 121.6nm to 160nm. Both VUV bandpass filter types are over-coated with the MDM filter coating. All VUV filter substrates are highly polished to a <40-20 scratch & dig surface quality with less than 5 arc minutes parallelism.

Open-Faced VUV Optical Bandpass Filters are fairly soft and must be handled with due care. For added durability and protection from the environment, VUV bandpass filters from 170nm to 214nm can be special ordered with a UV Fused Silica cover window that is edge sealed to the Open-faced VUV bandpass filter. For more information on covered & edge sealed VUV Optical Bandpass Filters and/or VUV filter peak wavelengths not listed below, please contact eSource Optics.



All eSource Optics VUV Optical Bandpass Filters are supplied with individual Vacuum UV % Transmission Calibration Curves detailing VUV-UV spectral performance characteristics. VUV Optical Bandpass Filters are mainly used in VUV D2 light source applications requiring a narrow spectral bandwidth and a high signal-to-noise ratio.

For more information on VUV Optical Bandpass Filters, please refer to our Optics Tutorial page.

VUV OPTICAL FILTER SPECIFICATIONS

Substrate Material : VUV Grade MgF2 &

VUV Grade CaF2 crystals, Crystal Quartz

Diameter (Ø) Tolerance: ± 0.25mm

Thickness: ~1.5 - 5.0mm

Surface Quality: <=40-20 scratch-dig

Parallelism: <=10 arc minutes or better

Clear Aperture: central 80%

Edge Chamfer: ~0.5mm x 45 degrees

Filter FWHM: FNB = ~ 20nm
Filter Blocking: Approx ~10^-3 to ~10^-4

>240nm to UV through FIR typical
Construction: Unmounted and Open-Faced;

>170nm can be covered (contact us)

Typical VUV % Transmission 122FNB

See other typical VUV-UV Filter Transmission Curves

Peak Wavelength (nm)

FWHM (nm)

Min. Peak Transmission

Diameter(mm)

Product #

Price
Order*

122 +/- 2.5 Lyman Alpha ~20 15 % T VUV Optical Filter 12.7 12122FNB $1335.00 12122FNB

122 +/- 2.5 Lyman Alpha ~20 15 % T VUV Optical Filter 25.4
25122FNB
$1390.00
25122FNB

122 +/- 2.5 Lyman Alpha ~20 15% T VUV Optical Filter 50.8
50122FNB
$1975.00
50122FNB

130 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12130FNB
$1335.00

12130FNB

130 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25130FNB
$1390.00
25130FNB

130 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50130FNB
$1975.00
50130FNB

140 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12140FNB
$1335.00
12140FNB

140 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25140FNB
$1390.00
25140FNB

140 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50140FNB
$1975.00
50140FNB

150 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12150FNB
$1335.00
12150FNB

150 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25150FNB
$1390.00
25150FNB

150 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50150FNB
$1975.00
50150FNB

155 +/- 2.5 C IV 20 +/- 5 12 % T VUV Optical Filter 12.7
12155FNB
$1040.00
12155FNB

155 +/- 2.5 C IV 20 +/- 5 12 % T VUV Optical Filter 25.4
25155FNB
$1145.00
25155FNB

155 +/- 2.5 C IV 20 +/- 5 12 % T VUV Optical Filter 50.8
50155FNB
$1735.00
50155FNB

158 +/- 2.5 F Laser 20 +/- 5 12 % T VUV Optical Filter 12.7
12158FNB
$1040.00
12158FNB

158 +/- 2.5 F Laser 20 +/- 5 12 % T VUV Optical Filter 25.4
25158FNB
$1145.00
25158FNB

158 +/- 2.5 F Laser 20 +/- 5 12 % T VUV Optical Filter 50.8
50158FNB
$1735.00
50158FNB

161 +/- 2.5 20 +/- 7.5 12 % T VUV Optical Filter 12.7
12161FNB
$1040.00
12161FNB

161 +/- 2.5 20 +/- 7.5 12 % T VUV Optical Filter 25.4
25161FNB
$1145.00
25161FNB

161 +/- 2.5 20 +/- 7.5 12 % T VUV Optical Filter 50.8
50161FNB
$1735.00
50161FNB

170 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 12.7
12170FNB
$500.00
12170FNB

170 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25170FNB
$645.00
25170FNB

170 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 50.8
50170FNB
$745.00
50170FNB

172 +/- 2.5 Xe Laser 20 +/- 7.5 15 % T VUV Optical Filter 12.7
12172FNB
$500.00
12172FNB

172 +/- 2.5 Xe Laser 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25172FNB
$565.00
25172FNB

172 +/- 2.5 Xe Laser 20 +/- 7.5 15 % T VUV Optical Filter 50.8
50172FNB
$645.00
50172FNB

180 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 12.7
12180FNB
$450.00
12180FNB

180 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25180FNB
$500.00
25180FNB

180 +/- 2.5 20 +/- 7.5 15 % T VUV Optical Filter 50.8
50180FNB
$595.00
50180FNB

184.9 +/- 2.5 Hg 20 +/- 7.5 15 % T VUV Optical Filter 12.7 12185FNB $450.00 12185FNB

184.9 +/- 2.5 Hg 20 +/- 7.5 15 % T VUV Optical Filter 25.4
25185FNB
$500.00
25185FNB

184.9 +/- 2.5 Hg 20 +/- 7.5 15 % T VUV Optical Filter 50.8 50185FNB $595.00 50185FNB

190 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 12.7
12190FNB
$450.00
12190FNB

190 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25190FNB
$500.00
25190FNB

190 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50190FNB
$595.00
50190FNB

193 +/- 2.5 ArF Laser 20 +/- 5 15 % T VUV Optical Filter 12.7
12193FNB
$450.00
12193FNB

193 +/- 2.5 ArF Laser 20 +/- 5 15 % T VUV Optical Filter 25.4
25193FNB
$500.00
25193FNB

193 +/- 2.5 ArF Laser 20 +/- 5 15 % T VUV Optical Filter 50.8
50193FNB
$595.00
50193FNB

200 +/- 2.5 20 +/- 5 15% T VUV Optical Filter 12.7
12200FNB
$425.00
12200FNB

200 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 25.4
25200FNB
$450.00
25200FNB

200 +/- 2.5 20 +/- 5 15 % T VUV Optical Filter 50.8
50200FNB
$575.00
50200FNB

214 +/- 2.5 Zn 20 +/- 5 15 % T VUV Optical Filter 12.7
12214FNB
$365.00
12214FNB

214 +/- 2.5 Zn 20 +/- 5 15 % T VUV Optical Filter 25.4
25214FNB
$395.00
25214FNB

214 +/- 2.5 Zn 20 +/- 5 15 % T VUV Optical Filter 50.8
50214FNB
$525.00
50214FNB

(*Contact us to order)

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                        Also see eSource Optics VUV Broadband Filters

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